Laser cutting machine annealing technology
by:Transon
2020-10-28
Annealing technology, laser cutting machine is a kind of new technology, semiconductor processing effect is better than conventional thermal annealing.
After laser annealing, impurities for a rate can reach 98% ~ 99%, and can reduce the resistivity of polysilicon 1/2 ~ 1/3 of ordinary annealing, still can greatly improve the integration of integrated circuit, circuit element, the interval between the reduced to zero.
5 microns.
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